May 11, 2024  
2021/2022 University Catalog 
    
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2021/2022 University Catalog [ARCHIVED CATALOG]

M E 685 - Micro-Electro-Mechanical Systems (MEMS) Design and Applications

Units: 3

Same As: E E 685 .
Prerequisite(s): M E 585 .

Design and manufacturing technology for micro- and nano-scale devices. Topics include solid state transducers, microscale physics, biomedical microelectronics, microfluidics, biosensors, and hybrid integration of microfabrication technology. Emphasis on biomedical applications.