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Sep 28, 2024
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2020/2021 University Catalog [ARCHIVED CATALOG]
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M E 685 - Micro-Electro-Mechanical Systems (MEMS) Design and Applications Units: 3
Same As: E E 685 . Prerequisite(s): M E 585 .
Design and manufacturing technology for micro- and nano-scale devices. Topics include solid state transducers, microscale physics, biomedical microelectronics, microfluidics, biosensors, and hybrid integration of microfabrication technology. Emphasis on biomedical applications.
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