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Nov 05, 2024
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2024-2025 University Catalog
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M E 585 - Fundamentals of Micro-Electro-Mechanical Systems (MEMS) Units: 3
Grading Method: LCR: Letter Grade with Cr/NC available. The grading default for the class will be letter grade, but students can opt to take it for Cr/NC
One lecture and four hours of laboratory.
Prerequisite(s): For aerospace engineering majors: M E 220 [or A E 220 ], E E 204 , M E 240 and A E 310 . For electrical engineering majors: E E 330 and M E 240 . For mechanical engineering majors: M E 240 , M E 220 [or A E 220 ] and M E 314 . Proof of completion of prerequisite(s) required: Copy of transcript; or graduate standing.
Microfabrication techniques, microsensors and microactuators, and scaling laws. A design project of a micro-device including schematic creation, test of performance, layout generation, and layout versus schematic comparison.
Maximum Credits: 3
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