Nov 05, 2024  
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2024-2025 University Catalog

M E 685 - Micro-Electro-Mechanical Systems (MEMS) Design and Applications

Units: 3

Grading Method: LTR: Letter Graded. The class will be offered for letter grade with no option to take it for Cr/NC

Same As: E E 685 .


Prerequisite(s): M E 585 .

Design and manufacturing technology for micro- and nano-scale devices. Topics include solid state transducers, microscale physics, biomedical microelectronics, microfluidics, biosensors, and hybrid integration of microfabrication technology. Emphasis on biomedical applications.

Maximum Credits: 3