M E 585 - Fundamentals of Micro-Electro-Mechanical Systems (MEMS)

Units: 3

Grading Method: LCR: Letter Grade with Cr/NC available. The grading default for the class will be letter grade, but students can opt to take it for Cr/NC

One lecture and four hours of laboratory.

Prerequisite(s): For aerospace engineering majors: M E 220 [or A E 220], E E 204, M E 240 and A E 310. For electrical engineering majors: E E 330 and M E 240. For mechanical engineering majors: M E 240, M E 220 [or A E 220] and M E 314. Proof of completion of prerequisite(s) required: Copy of transcript; or graduate standing.

Microfabrication techniques, microsensors and microactuators, and scaling laws. A design project of a micro-device including schematic creation, test of performance, layout generation, and layout versus schematic comparison.

Maximum Credits: 3