Jan 15, 2025  
2022/2023 University Catalog 
    
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2022/2023 University Catalog [ARCHIVED CATALOG]

M E 585 - Fundamentals of Micro-Electro-Mechanical Systems (MEMS)

Units: 3

One lecture and four hours of laboratory.

Prerequisite(s): For aerospace engineering majors: M E 220  [or A E 220 ], E E 204 , M E 240  and A E 310 . For electrical engineering majors: E E 330  and M E 240 . For mechanical engineering majors: M E 240 , M E 220  [or A E 220 ] and M E 314 . Proof of completion of prerequisite(s) required: Copy of transcript; or graduate standing.

Microfabrication techniques, microsensors and microactuators, and scaling laws. A design project of a micro-device including schematic creation, test of performance, layout generation, and layout versus schematic comparison.